FTIR ANALYSIS OF SILICON AND OXIDE SILICON THIN FILMS

Muradulla Normuradov; Kuvondik Dovranov; Khuzhamkul Davranov; Muzaffar Davlatov

Physics and technology

No. 4 (2023): Scientific journal of the Fergana State University (Exact and natural sciences)

FTIR ANALYSIS OF SILICON AND OXIDE SILICON THIN FILMS

Normuradov Muradulla Togaevich^▸^▾
Dovranov Kuvondik Turakulovich^▸^▾
Davranov Khuzhamkul Turakulovich^▸^▾
Davlatov Muzaffar Abduxamidovich^▸^▾

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Submitted: November 24, 2023
Published: 2023-11-28

Abstract

FT-IR spectrometers are used to solve various problems of modern analytics. Designed for qualitative analysis, checking the refractive index of thin films, the thickness of thin films. We studied the mid-infrared transmission and absorption spectra, refractive index, layer thickness, standard deviation, incident angle, average interference fringes, and the coupling between silicon and oxygen of thin films obtained by the ion-plasma method.

References

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Scardera G., Puzzer T., Conibeer G., and Green M.A. Journal of Applied Physics 104, 104310 (2008); https://doi.org/10.1063/1.3021158
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[1] Borilo L.P. Thin-film inorganic nanosystems. – Tomsk: 2012 – 134 p.

[2] Scardera G., Puzzer T., Conibeer G., and Green M.A. Journal of Applied Physics 104, 104310 (2008); https://doi.org/10.1063/1.3021158

[3] Normuradov M.T., Dovranov K.T., Davranov Kh.T.. QarDU xabarlari. №(4/1)54. pp. 27-31.2022.

[4] Efimova A.I. A special physical workshop. Moscow, 2014.C: 41.

[5] Normuradov M.T., Dovranov K.T., Davranov Kh.T., Davlatov M. “Prospects of development of the physics of condensed matter” International scientific and scientific-technical conference materials. October 4-15.pp.113-115 2022.

[6] Caroline M., Parler James A., Ritter Michael, Amiridis D.. Journal of Non-Crystalline Solids. Vol. 279, Issues 2–3, February 2001, Pag, 119-125. https://doi.org/10.1016/S0022-3093(00)00401-4

[7] Queeney K.T., Weldon M.K., Chang J.P., Chabal Y.J., Gurevich A.B., Sapjeta J., and Opila R.L. Journal of Applied Physics 87, 1322 (2000); https://doi.org/10.1063/1.372017

[8] Francesco Boschetto, Nami Toyama, Satoshi Horiguchi, M. Ryan Bock, J. Bryan McEntire, Tetsuya Adachi, Elia Marin, Wenliang Zhu, B. Osam Mazda. Sonny Balde and Giuseppe Pezzotti. II.Fourier transform infrared spectroscopy. Analyst. 2018,143, 2128-2140.

[9] https://doi.org/10.1039/C8AN00234G

[10] Gun’ko V.M., Pakhlov E.M., Skubiszewska-Zięba J., Blitz J.P. Vibrational Spectroscopy. Vol. 88, January 2017, Pag, 56-62. https://doi.org/10.1016/j.vibspec.2016.11.003