KREMNIY YUZASIDA NANOFAZALI CU15SI4/SI PLYONKALARINING SHAKLLANISHI VA ULARNING ELEKTROFIZIK XUSUSIYATLARI
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Annotatsiya
Ushbu maqolada monokristall kremniy yuzasida yupqa Cu15Si4 plyonkalarning hosil bo'lishi, ularning sirt morfologiyasi va plyonka hosil bo'lish mexanizmi haqida ilmiy ma'lumotlar keltirilgan. Magnetronli purkashning turli usullaridan foydalangan holda metallar va silitsidlarning nanoplyonkalarini hosil qilish mexanizmi tushuntirilgan. Plyonkalarning qalinligi SEM yordamida o'lchandi. Elementlarning tarkibi energiya dispers spektri yordamida aniqlandi. Sirt morfologiyasi lazer konfokal mikroskop yordamida tekshirildi. Elektr xususiyatlari SBA-458 yordamida aniqlandi. Optik xususiyatlar IQ spektrofotometr yordamida tahlil qilindi. Mis silitsid plyonkasi hosil bo'lishi mis kristall o'lchamiga va taglik haroratiga bog'liq bo'lib, 467oC haroratda 130 nm qalinlikdagi mis qatlami ostida 75 nm qalinlikdagi Cu15Si4 plyonkasi hosil bo'ldi. Ushbu tadqiqot metall oksidli yarimo'tkazgichli tranzistorlar va yuqori tezlikdagi integral mikrosxemalar (IS) ish faoliyatini yaxshilash uchun mis kremniydan foydalanish imkoniyatlarini ko'rsatdi.
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