FTIR ANALYSIS OF SILICON AND OXIDE SILICON THIN FILMS

Article Sidebar

PDF
Published: noy 28, 2023
Keywords:
silicon oxide, FT-IR spectrometer, thin films, absorption spectra, transmission spectra, “ion-plasma” method, refraction index, ATR spectrum

Main Article Content

Normuradov Muradulla Togaevich
Doctor of Physical and Mathematical Sciences, Professor, Karshi State University
Dovranov Kuvondik Turakulovich
Karshi State Universit
Davranov Khuzhamkul Turakulovich
Karshi State University
Davlatov Muzaffar Abduxamidovich
Karshi State University

Abstract

FT-IR spectrometers are used to solve various problems of modern analytics. Designed for qualitative analysis, checking the refractive index of thin films, the thickness of thin films. We studied the mid-infrared transmission and absorption spectra, refractive index, layer thickness, standard deviation, incident angle, average interference fringes, and the coupling between silicon and oxygen of thin films obtained by the ion-plasma method.

Article Details

How to Cite
Normuradov , M., Dovranov , K., Davranov , K., & Davlatov , M. (2023). FTIR ANALYSIS OF SILICON AND OXIDE SILICON THIN FILMS. Scientific Journal of the Fergana State University, 29(4), 68. Retrieved from https://journal.fdu.uz/index.php/sjfsu/article/view/2701
Issue
No. 4 (2023): Scientific journal of the Fergana State University (Exact and natural sciences)
Section
Physics and technology
Creative Commons License

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Author Biographies

Dovranov Kuvondik Turakulovich, Karshi State Universit

PhD student, Karshi State Universit

Davranov Khuzhamkul Turakulovich, Karshi State University

PhD student, Karshi State University

Davlatov Muzaffar Abduxamidovich, Karshi State University

PhD student, Karshi State University

References

Borilo L.P. Thin-film inorganic nanosystems. – Tomsk: 2012 – 134 p.

Scardera G., Puzzer T., Conibeer G., and Green M.A. Journal of Applied Physics 104, 104310 (2008); https://doi.org/10.1063/1.3021158

Normuradov M.T., Dovranov K.T., Davranov Kh.T.. QarDU xabarlari. №(4/1)54. pp. 27-31.2022.

Efimova A.I. A special physical workshop. Moscow, 2014.C: 41.

Normuradov M.T., Dovranov K.T., Davranov Kh.T., Davlatov M. “Prospects of development of the physics of condensed matter” International scientific and scientific-technical conference materials. October 4-15.pp.113-115 2022.

Caroline M., Parler James A., Ritter Michael, Amiridis D.. Journal of Non-Crystalline Solids. Vol. 279, Issues 2–3, February 2001, Pag, 119-125. https://doi.org/10.1016/S0022-3093(00)00401-4

Queeney K.T., Weldon M.K., Chang J.P., Chabal Y.J., Gurevich A.B., Sapjeta J., and Opila R.L. Journal of Applied Physics 87, 1322 (2000); https://doi.org/10.1063/1.372017

Francesco Boschetto, Nami Toyama, Satoshi Horiguchi, M. Ryan Bock, J. Bryan McEntire, Tetsuya Adachi, Elia Marin, Wenliang Zhu, B. Osam Mazda. Sonny Balde and Giuseppe Pezzotti. II.Fourier transform infrared spectroscopy. Analyst. 2018,143, 2128-2140.

https://doi.org/10.1039/C8AN00234G

Gun’ko V.M., Pakhlov E.M., Skubiszewska-Zięba J., Blitz J.P. Vibrational Spectroscopy. Vol. 88, January 2017, Pag, 56-62. https://doi.org/10.1016/j.vibspec.2016.11.003