FORMATION OF NANOPHASE CU15SI4/SI FILMS ON THE SILICON SURFACE AND THEIR ELECTROPHYSICAL PROPERTIES. Scientific journal of the Fergana State University, [S. l.], v. 31, n. 1, p. 99, 2025. Disponível em: https://journal.fdu.uz/index.php/sjfsu/article/view/6213. Acesso em: 9 jan. 2026.